Chowdhury, Towhid Adnan (2023) Investigation of Sprayed Lu2O3 Thin Films Using XPS. Advances in Materials Physics and Chemistry, 13 (11). pp. 197-205. ISSN 2162-531X
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Official URL: https://doi.org/10.4236/ampc.2023.1311014
Abstract
Spray pyrolysis method was used to deposit Lutetium Oxide (Lu2O3) thin films using lutetium (III) chloride as source material and water as oxidizer. Annealing was carried out in argon atmosphere at 450°C for 60 minutes of the films. To investigate the composition and stoichiometry of sprayed as-deposited and annealed Lu2O3 thin films, depth profile studies using X-ray photoelectron spectroscopy (XPS) was done. Nearly stoichiometric was observed for both annealed and as-deposited films in inner and surface layers.
| Item Type: | Article |
|---|---|
| Subjects: | OA Open Library > Mathematical Science |
| Depositing User: | Unnamed user with email support@oaopenlibrary.com |
| Date Deposited: | 20 Dec 2023 07:28 |
| Last Modified: | 20 Dec 2023 07:28 |
| URI: | http://archive.sdpublishers.com/id/eprint/2372 |
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